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금속 범프와 마이크로 채널 액체 냉각 구조를 이용한 소자의 열 관리 연구
Translated title of the contribution
:
IC Thermal Management Using Microchannel Liquid Cooling Structure with Various Metal Bumps
Sarah Eunkyung Kim
,
Sung Dong Kim
Dept. of Semiconductor Engineering
School of Mechanical Systems Engineering/ Intelligent Robotics Engineering
Research output
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peer-review
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Engineering
Microchannel
100%
Si Wafer
40%
Power Density
20%
Microelectronics
20%
Integrated Circuit
20%
Thermal Problem
20%
Heat Loss
20%
Heating Temperature
20%
Chilling
20%
Transistor
20%
Material Science
Density
100%
Thermal Management
100%
Electronic Circuit
33%
Transistor
33%
Reactive Ion Etching
33%