나노포지셔너 개발을 위한 테스트벤치 제작

Translated title of the contribution: Manufacturing Test-bench for Developing Nanopositioner

Research output: Contribution to journalArticlepeer-review

Abstract

In this study, a test-bench for developing and verifying a 1- or 2-axis nanopositioner was manufactured. Using this test-bench, adesigned and manufactured flexure stage based on an analysis can configure nanopositioning systems. A breadboard and fixture were fabricated to be equipped with various types of mechanisms and sizes of stages. The test-bench has linear encoders for calibrating sensors and verifying the orthogonality and parasitic motion of 2-axis nested-type nanopositioners. The controller was developed using LabVIEW and a TI microcontroller. A case study that exemplified the test bench for developing a nanopositioner by senior undergraduate students is shown.

Translated title of the contributionManufacturing Test-bench for Developing Nanopositioner
Original languageKorean
Pages (from-to)593-599
Number of pages7
Journal한국생산제조시스템학회지
Volume22
Issue number3
DOIs
StatePublished - 2013

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