Abstract
With the advances in and expansion of the semiconductor and display businesses in Korea the demand of the engineers in such fields is increasing. Keeping pace with the trend, the semiconductor courses in undergraduate not only include the newest technologies in addition to the fundamental theories but fabrication related technologies as well in order to produce engineers with practical knowledge. However, since semiconductor fabrication requires expensive equipment and materials in a clean room, laboratory class can't be provided in undergraduate. To overcome this limitation actual fabrication processes are recorded in video and played in class. In addition, 3D visualization of fabrication processes can be used.
| Translated title of the contribution | Development of a Mask Aligner Simulator for Education |
|---|---|
| Original language | Korean |
| Pages (from-to) | 43-49 |
| Number of pages | 7 |
| Journal | 한국시뮬레이션학회 논문지 |
| Volume | 26 |
| Issue number | 4 |
| DOIs | |
| State | Published - Dec 2017 |