Abstract
A SAW strain sensor based on Shear Horizontal wave with an 92 MHz central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The 41o YX LiNbO3 was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient (K2=17.2%). And to compare with Rayleigh wave mode, 128o YX LiNbO3 was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 kHz / % and 0.99, respectively.
| Translated title of the contribution | Development of novel strain sensor using surface acoustic wave |
|---|---|
| Original language | Korean |
| Pages (from-to) | 594-599 |
| Number of pages | 6 |
| Journal | 전기학회논문지 |
| Volume | 60 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 2011 |