정렬형 접힌 빔 유연기구 기반 팁-틸트-피스톤 정렬기구의 기생운동 분석

This study introduces a novel tip-tilt-piston aligner based on aligned folded beam flexure. It was designed to enhance precision positioning by minimizing parasitic motion. Through finite element analysis, we compared this aligner with a traditional folded beam flexure-based mechanism, revealing a remarkable 135% increase in translational stiffness and superior rotational stiffness ratios. These advancements are expected to reduce parasitic motion arising from actuator misalignment and external disturbances, ultimately elevating positioning accuracy. The aligner’s suitability as a guiding device was affirmed and optimal actuator placement positions were determined. This research provides valuable insights into precision positioning mechanism design, underscoring the role of flexure geometry and precise actuator placement in minimizing parasitic motion for improved accuracy.