초음파 분무 열분해 증착 제어 시스템 개발

A control system for ultrasonic spray pyrolysis deposition was developed that cancoat a large size glass panel with a transparent conductive oxide. It consists ofseveral ultrasonic atomizer devices to cover a large area and a host computer forindividually controlling the devices. The sub‐controller in an ultrasonic atomizerdevice can adjust the flow rate of the atomized conductive oxide gas by setting theflow rate of the solution and regulating the level of the solution in the tank. Toconstruct a feedback control loop for level regulation, a level sensor that utilized aninfrared distance sensor and an electric circuit for adjusting the ultrasonic oscillatorwere developed. The host program was also developed, which can monitor andcontrol the sub‐controllers. A proportional–integral controller was developed for asimplified model, and its operation was verified through an experiment.