A Bioinspired Piezoelectric Cilia Array for Sensing of Hydrodynamic Flow

Le Giang Tran, Dong Hyun Joo, Woo Tae Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

This paper presents a self-powered flow sensor that targeted the maneuvering of the unmanned underwater vehicles (UUVs). The fabrication process was taking advantage of the thermoplastic material. A piezoelectric compound of barium titanate (BaTiO3), multi-walled carbon nanotube (MWCNT) and ethylene-vinyl acetate (EVA) were used to replicate the cilia structure from a PDMS mold. The fabricated flow sensor comprised of an array of piezoelectric cilia structures. Experimental data indicated that the generated Vrms increase from 1.8 mV to 2.7 mV when the sensor is subjected to the air flow.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1937-1940
Number of pages4
ISBN (Electronic)9781728120072
DOIs
StatePublished - Jun 2019
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/TerritoryGermany
CityBerlin
Period23/06/1927/06/19

Keywords

  • flow sensor
  • microneedle
  • Piezoelectric
  • thermal expansion
  • UUV

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