A dither signal imposition to enhance an image in a scanning electron microscope

Kwang Oh Jung, Dong Hwan Kim

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

In obtaining an image in a scanning microscope many kinds of noise are involved. This noise has a large influence on the image of the sample. In this research, we propose a method for improving image quality by applying dither signal injection. This method involves minimizing the noise that occurs in scan control circuits, which injects both noise and electron beams emitted in the course of A/D (analog to digital). The collected secondary electrons are multiplied through a photo multiplier tube (PMP) and then are converted to digital through an A/D converter. At this point, distortion occurs during the A/D process, which appears as white noise. We propose to minimize this white noise by using dither.

Original languageEnglish
Pages (from-to)2601-2603
Number of pages3
JournalMicroelectronic Engineering
Volume88
Issue number8
DOIs
StatePublished - Aug 2011

Keywords

  • Dithering
  • Image improvement
  • Noise reduction
  • Scanning electron microscope

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