TY - GEN
T1 - A High-throughput Uniform-Sized Droplet Generator with a Triangular Cross-Section Channel Fabricated by Simple Mems Process and Self-Alignment
AU - Oh, Byeolnim
AU - Cho, Youngseo
AU - Park, Jaewon
AU - Cho, Younghak
AU - Kim, Hyun Soo
N1 - Publisher Copyright:
© 2023 IEEJ.
PY - 2023
Y1 - 2023
N2 - In this study, a step emulsification (SE) device with an inverted triangular cross-section channel was developed for high-throughput monodisperse droplet generation. The SE device consisting of two different height channels (step ratio of sample solution and carrier oil channel heights = 1 : 4) was fabricated by simple, low-cost MEMS processes (e.g., anisotropic wet etching), and the triangular channel design for the sample solution was easily formed through a self-alignment process based on geometric similarity. The developed SE device successfully created the same size of droplets over a wide range of flow rate variations. The stable and robust droplet generation capability of the developed device allowed for massive production.
AB - In this study, a step emulsification (SE) device with an inverted triangular cross-section channel was developed for high-throughput monodisperse droplet generation. The SE device consisting of two different height channels (step ratio of sample solution and carrier oil channel heights = 1 : 4) was fabricated by simple, low-cost MEMS processes (e.g., anisotropic wet etching), and the triangular channel design for the sample solution was easily formed through a self-alignment process based on geometric similarity. The developed SE device successfully created the same size of droplets over a wide range of flow rate variations. The stable and robust droplet generation capability of the developed device allowed for massive production.
KW - Monodisperse droplet generation
KW - step emulsification
KW - triangular cross-section
UR - https://www.scopus.com/pages/publications/85193482353
M3 - Conference contribution
AN - SCOPUS:85193482353
T3 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
SP - 474
EP - 477
BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Y2 - 25 June 2023 through 29 June 2023
ER -