A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface

Tao Sun; Srinivas Merugu; Wei Mong Tsang; Woo Tae Park; Ning Xue; Yunxiao Liu; Beibei Han; Gavin Dawe; Alex Yuandong Gu

doi:10.1109/MEMSYS.2016.7421581

A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface

Tao Sun
, Srinivas Merugu
, Wei Mong Tsang
, Woo Tae Park
, Ning Xue
, Yunxiao Liu
, Beibei Han
, Gavin Dawe
, Alex Yuandong Gu

Dept. of Mechanical & Automotive Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

To establish a reliable brain-machine interface (BMI), we report for the first time, a multifunctional porous silicon (PSi)-parylene neural probe using a CMOS compatible fabrication process. The biodegradable PSi shank serves as a mechanical stiffener for insertion process, then dissolves to leave only the polymeric structure to reduce stiffness mismatch between implant and cortical tissue, thus attenuates tissue responses. Moreover, its porous structure can serve as drug reservoir. The healing of the insertion trauma can be enhanced by continuously releasing pre-loaded drugs with the PSi degradation. Hence, the neural probe enables a more reliable BMI.

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	153-156
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421581
State	Published - 26 Feb 2016
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

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10.1109/MEMSYS.2016.7421581

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Sun, T., Merugu, S., Tsang, W. M., Park, W. T., Xue, N., Liu, Y., Han, B., Dawe, G., & Gu, A. Y. (2016). A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 153-156). Article 7421581 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421581

Sun, Tao ; Merugu, Srinivas ; Tsang, Wei Mong et al. / A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 153-156 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{c1e17b57ab2e472084723b24df2037b6,

title = "A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface",

abstract = "To establish a reliable brain-machine interface (BMI), we report for the first time, a multifunctional porous silicon (PSi)-parylene neural probe using a CMOS compatible fabrication process. The biodegradable PSi shank serves as a mechanical stiffener for insertion process, then dissolves to leave only the polymeric structure to reduce stiffness mismatch between implant and cortical tissue, thus attenuates tissue responses. Moreover, its porous structure can serve as drug reservoir. The healing of the insertion trauma can be enhanced by continuously releasing pre-loaded drugs with the PSi degradation. Hence, the neural probe enables a more reliable BMI.",

author = "Tao Sun and Srinivas Merugu and Tsang, \{Wei Mong\} and Park, \{Woo Tae\} and Ning Xue and Yunxiao Liu and Beibei Han and Gavin Dawe and Gu, \{Alex Yuandong\}",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",

year = "2016",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2016.7421581",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "153--156",

booktitle = "MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems",

}

Sun, T, Merugu, S, Tsang, WM, Park, WT, Xue, N, Liu, Y, Han, B, Dawe, G & Gu, AY 2016, A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421581, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 153-156, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421581

A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface. / Sun, Tao; Merugu, Srinivas; Tsang, Wei Mong et al.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 153-156 7421581 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface

AU - Sun, Tao

AU - Merugu, Srinivas

AU - Tsang, Wei Mong

AU - Park, Woo Tae

AU - Xue, Ning

AU - Liu, Yunxiao

AU - Han, Beibei

AU - Dawe, Gavin

AU - Gu, Alex Yuandong

PY - 2016/2/26

Y1 - 2016/2/26

N2 - To establish a reliable brain-machine interface (BMI), we report for the first time, a multifunctional porous silicon (PSi)-parylene neural probe using a CMOS compatible fabrication process. The biodegradable PSi shank serves as a mechanical stiffener for insertion process, then dissolves to leave only the polymeric structure to reduce stiffness mismatch between implant and cortical tissue, thus attenuates tissue responses. Moreover, its porous structure can serve as drug reservoir. The healing of the insertion trauma can be enhanced by continuously releasing pre-loaded drugs with the PSi degradation. Hence, the neural probe enables a more reliable BMI.

AB - To establish a reliable brain-machine interface (BMI), we report for the first time, a multifunctional porous silicon (PSi)-parylene neural probe using a CMOS compatible fabrication process. The biodegradable PSi shank serves as a mechanical stiffener for insertion process, then dissolves to leave only the polymeric structure to reduce stiffness mismatch between implant and cortical tissue, thus attenuates tissue responses. Moreover, its porous structure can serve as drug reservoir. The healing of the insertion trauma can be enhanced by continuously releasing pre-loaded drugs with the PSi degradation. Hence, the neural probe enables a more reliable BMI.

UR - https://www.scopus.com/pages/publications/84970949929

U2 - 10.1109/MEMSYS.2016.7421581

DO - 10.1109/MEMSYS.2016.7421581

M3 - Conference contribution

AN - SCOPUS:84970949929

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 153

EP - 156

BT - MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016

Y2 - 24 January 2016 through 28 January 2016

ER -

Sun T, Merugu S, Tsang WM, Park WT, Xue N, Liu Y et al. A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 153-156. 7421581. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421581

A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface

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