A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism

Jungjae Kim, Dahoon Ahn, Young Man Choi, Jaehwa Jeong

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, a new single-axis flexure-based micropositioning stage is proposed, which is guided by a skewed double compound parallelogram. This skewed double compound parallelogram gives a function of guide mechanism as well as a function of displacement amplifier. Using this self-guided amplifying mechanism, a longrange motion can be achieved within a compact size. For an example, we designed a millimeter-range flexure-based stage using a stack-type piezo-actuator. Leaf-springs are utilized for hinges, which can be monolithically machined by electric discharge machining.

Original languageEnglish
Title of host publicationProceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
EditorsH. Van Brussel, Henny Spaan, P. Shore, Theresa Burke
Publishereuspen
Pages376-379
Number of pages4
ISBN (Electronic)9780955308284
StatePublished - 2010
Event10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 - Delft, Netherlands
Duration: 31 May 20104 Jun 2010

Publication series

NameProceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Volume1

Conference

Conference10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Country/TerritoryNetherlands
CityDelft
Period31/05/104/06/10

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