A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism

Jungjae Kim; Dahoon Ahn; Young Man Choi; Jaehwa Jeong

A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism

Jungjae Kim
, Dahoon Ahn
, Young Man Choi
, Jaehwa Jeong

Dept. of Mechanical System and Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this work, a new single-axis flexure-based micropositioning stage is proposed, which is guided by a skewed double compound parallelogram. This skewed double compound parallelogram gives a function of guide mechanism as well as a function of displacement amplifier. Using this self-guided amplifying mechanism, a longrange motion can be achieved within a compact size. For an example, we designed a millimeter-range flexure-based stage using a stack-type piezo-actuator. Leaf-springs are utilized for hinges, which can be monolithically machined by electric discharge machining.

Original language	English
Title of host publication	Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Editors	H. Van Brussel, Henny Spaan, P. Shore, Theresa Burke
Publisher	euspen
Pages	376-379
Number of pages	4
ISBN (Electronic)	9780955308284
State	Published - 2010
Event	10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 - Delft, Netherlands Duration: 31 May 2010 → 4 Jun 2010

Publication series

Name	Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Volume	1

Conference

Conference	10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Country/Territory	Netherlands
City	Delft
Period	31/05/10 → 4/06/10

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Cite this

Kim, J., Ahn, D., Choi, Y. M., & Jeong, J. (2010). A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism. In H. Van Brussel, H. Spaan, P. Shore, & T. Burke (Eds.), Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 (pp. 376-379). (Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010; Vol. 1). euspen.

Kim, Jungjae ; Ahn, Dahoon ; Choi, Young Man et al. / A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism. Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. editor / H. Van Brussel ; Henny Spaan ; P. Shore ; Theresa Burke. euspen, 2010. pp. 376-379 (Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010).

@inproceedings{b1b2302adcca4c6ea90ac083fc6583c7,

title = "A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism",

abstract = "In this work, a new single-axis flexure-based micropositioning stage is proposed, which is guided by a skewed double compound parallelogram. This skewed double compound parallelogram gives a function of guide mechanism as well as a function of displacement amplifier. Using this self-guided amplifying mechanism, a longrange motion can be achieved within a compact size. For an example, we designed a millimeter-range flexure-based stage using a stack-type piezo-actuator. Leaf-springs are utilized for hinges, which can be monolithically machined by electric discharge machining.",

author = "Jungjae Kim and Dahoon Ahn and Choi, \{Young Man\} and Jaehwa Jeong",

year = "2010",

language = "English",

series = "Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010",

publisher = "euspen",

pages = "376--379",

editor = "\{Van Brussel\}, H. and Henny Spaan and P. Shore and Theresa Burke",

booktitle = "Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010",

note = "10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 ; Conference date: 31-05-2010 Through 04-06-2010",

}

Kim, J, Ahn, D, Choi, YM & Jeong, J 2010, A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism. in H Van Brussel, H Spaan, P Shore & T Burke (eds), Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010, vol. 1, euspen, pp. 376-379, 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010, Delft, Netherlands, 31/05/10.

A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism. / Kim, Jungjae; Ahn, Dahoon; Choi, Young Man et al.
Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. ed. / H. Van Brussel; Henny Spaan; P. Shore; Theresa Burke. euspen, 2010. p. 376-379 (Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism

AU - Kim, Jungjae

AU - Ahn, Dahoon

AU - Choi, Young Man

AU - Jeong, Jaehwa

PY - 2010

Y1 - 2010

N2 - In this work, a new single-axis flexure-based micropositioning stage is proposed, which is guided by a skewed double compound parallelogram. This skewed double compound parallelogram gives a function of guide mechanism as well as a function of displacement amplifier. Using this self-guided amplifying mechanism, a longrange motion can be achieved within a compact size. For an example, we designed a millimeter-range flexure-based stage using a stack-type piezo-actuator. Leaf-springs are utilized for hinges, which can be monolithically machined by electric discharge machining.

AB - In this work, a new single-axis flexure-based micropositioning stage is proposed, which is guided by a skewed double compound parallelogram. This skewed double compound parallelogram gives a function of guide mechanism as well as a function of displacement amplifier. Using this self-guided amplifying mechanism, a longrange motion can be achieved within a compact size. For an example, we designed a millimeter-range flexure-based stage using a stack-type piezo-actuator. Leaf-springs are utilized for hinges, which can be monolithically machined by electric discharge machining.

UR - https://www.scopus.com/pages/publications/84911431643

M3 - Conference contribution

AN - SCOPUS:84911431643

T3 - Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010

SP - 376

EP - 379

BT - Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010

A2 - Van Brussel, H.

A2 - Spaan, Henny

A2 - Shore, P.

A2 - Burke, Theresa

PB - euspen

T2 - 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010

Y2 - 31 May 2010 through 4 June 2010

ER -

Kim J, Ahn D, Choi YM, Jeong J. A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism. In Van Brussel H, Spaan H, Shore P, Burke T, editors, Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010. euspen. 2010. p. 376-379. (Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010).

A millimeter-range flexure-based micropositioning stage using a self-guided amplifying mechanism

Abstract

Publication series

Conference

UN SDGs

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