A silicon ring resonant tactile sensor for material elasticity measurement

Han Beibei, Yoon Yong-Jin, Park Woo-Tae, Lim Ruiqi, Wang Nan, Alex Gu Yuandong, Angel Lin Tsu-Hui

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Tactile sensors for measuring elastic properties of soft tissues have been previously implemented using large piezoelectric elements. However, due to limited sensitivity and spatial resolution inherent to the large form factor, their applications are limited. In this work, we report a miniaturized ring-shaped resonant tactile sensor for material elasticity measurement. The sensor, which is based on a silicon ring resonator incorporated with a rounded sensing tip and a mechanical stopper, is able to recognize materials of different young's modulus in the GPa range.

Original languageEnglish
Title of host publicationProceedings of the 2015 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages63-66
Number of pages4
ISBN (Electronic)9781479983636
DOIs
StatePublished - 30 Sep 2015
Event11th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015 - Singapore, Singapore
Duration: 1 Jun 20154 Jun 2015

Publication series

NameProceedings of the 2015 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015

Conference

Conference11th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015
Country/TerritorySingapore
CitySingapore
Period1/06/154/06/15

Keywords

  • material elasticity measurement
  • resonator
  • silicon ring
  • tactile sensor

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