@inproceedings{a5524a222d0c4166883903c754973841,
title = "A silicon ring resonant tactile sensor for material elasticity measurement",
abstract = "Tactile sensors for measuring elastic properties of soft tissues have been previously implemented using large piezoelectric elements. However, due to limited sensitivity and spatial resolution inherent to the large form factor, their applications are limited. In this work, we report a miniaturized ring-shaped resonant tactile sensor for material elasticity measurement. The sensor, which is based on a silicon ring resonator incorporated with a rounded sensing tip and a mechanical stopper, is able to recognize materials of different young's modulus in the GPa range.",
keywords = "material elasticity measurement, resonator, silicon ring, tactile sensor",
author = "Han Beibei and Yoon Yong-Jin and Park Woo-Tae and Lim Ruiqi and Wang Nan and Yuandong, \{Alex Gu\} and Tsu-Hui, \{Angel Lin\}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 11th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015 ; Conference date: 01-06-2015 Through 04-06-2015",
year = "2015",
month = sep,
day = "30",
doi = "10.1109/EDSSC.2015.7285050",
language = "English",
series = "Proceedings of the 2015 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "63--66",
booktitle = "Proceedings of the 2015 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015",
}