Analysis of machining characteristics in electrochemical etching using laser masking

Hong Shik Shin; Do Kwan Chung; Min Soo Park; Chong Nam Chu

doi:10.1016/j.apsusc.2011.10.010

Analysis of machining characteristics in electrochemical etching using laser masking

Hong Shik Shin, Do Kwan Chung, Min Soo Park, Chong Nam Chu

Dept. of Mechanical System and Design Engineering

Seoul National University

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Electrochemical etching using laser masking (EELM), which is a combination of laser beam irradiation for masking and electrochemical etching, allows the micro fabrication of stainless steel without photolithography technology. The EELM process can produce various micro patterns and multilayered structures. In this study, the machining characteristics of EELM were investigated. Changes in characteristics of recast layer formation and the protective effect of the recast layer according to the laser masking conditions and electrochemical etching conditions were investigated by field emission scanning electron microscopy (FE-SEM), focused ion beam (FIB) and X-ray photoelectron spectroscopy (XPS). The oxidized recast layer with a thickness of 500 nm was verified to yield a superior protective effect during electrochemical etching and good form accuracy. Finally, micro patterns and structures were fabricated by EELM.

Original language	English
Pages (from-to)	1689-1698
Number of pages	10
Journal	Applied Surface Science
Volume	258
Issue number	5
DOIs	https://doi.org/10.1016/j.apsusc.2011.10.010
State	Published - 15 Dec 2011

Keywords

EELM
Electrochemical etching
Laser masking
Micro fabrication
Micro patterning
Multilayered structures
Recast layer

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.apsusc.2011.10.010

Cite this

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title = "Analysis of machining characteristics in electrochemical etching using laser masking",

abstract = "Electrochemical etching using laser masking (EELM), which is a combination of laser beam irradiation for masking and electrochemical etching, allows the micro fabrication of stainless steel without photolithography technology. The EELM process can produce various micro patterns and multilayered structures. In this study, the machining characteristics of EELM were investigated. Changes in characteristics of recast layer formation and the protective effect of the recast layer according to the laser masking conditions and electrochemical etching conditions were investigated by field emission scanning electron microscopy (FE-SEM), focused ion beam (FIB) and X-ray photoelectron spectroscopy (XPS). The oxidized recast layer with a thickness of 500 nm was verified to yield a superior protective effect during electrochemical etching and good form accuracy. Finally, micro patterns and structures were fabricated by EELM.",

keywords = "EELM, Electrochemical etching, Laser masking, Micro fabrication, Micro patterning, Multilayered structures, Recast layer",

author = "Shin, \{Hong Shik\} and Chung, \{Do Kwan\} and Park, \{Min Soo\} and Chu, \{Chong Nam\}",

year = "2011",

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doi = "10.1016/j.apsusc.2011.10.010",

language = "English",

volume = "258",

pages = "1689--1698",

journal = "Applied Surface Science",

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}

TY - JOUR

T1 - Analysis of machining characteristics in electrochemical etching using laser masking

AU - Shin, Hong Shik

AU - Chung, Do Kwan

AU - Park, Min Soo

AU - Chu, Chong Nam

PY - 2011/12/15

Y1 - 2011/12/15

N2 - Electrochemical etching using laser masking (EELM), which is a combination of laser beam irradiation for masking and electrochemical etching, allows the micro fabrication of stainless steel without photolithography technology. The EELM process can produce various micro patterns and multilayered structures. In this study, the machining characteristics of EELM were investigated. Changes in characteristics of recast layer formation and the protective effect of the recast layer according to the laser masking conditions and electrochemical etching conditions were investigated by field emission scanning electron microscopy (FE-SEM), focused ion beam (FIB) and X-ray photoelectron spectroscopy (XPS). The oxidized recast layer with a thickness of 500 nm was verified to yield a superior protective effect during electrochemical etching and good form accuracy. Finally, micro patterns and structures were fabricated by EELM.

AB - Electrochemical etching using laser masking (EELM), which is a combination of laser beam irradiation for masking and electrochemical etching, allows the micro fabrication of stainless steel without photolithography technology. The EELM process can produce various micro patterns and multilayered structures. In this study, the machining characteristics of EELM were investigated. Changes in characteristics of recast layer formation and the protective effect of the recast layer according to the laser masking conditions and electrochemical etching conditions were investigated by field emission scanning electron microscopy (FE-SEM), focused ion beam (FIB) and X-ray photoelectron spectroscopy (XPS). The oxidized recast layer with a thickness of 500 nm was verified to yield a superior protective effect during electrochemical etching and good form accuracy. Finally, micro patterns and structures were fabricated by EELM.

KW - EELM

KW - Electrochemical etching

KW - Laser masking

KW - Micro fabrication

KW - Micro patterning

KW - Multilayered structures

KW - Recast layer

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U2 - 10.1016/j.apsusc.2011.10.010

DO - 10.1016/j.apsusc.2011.10.010

M3 - Article

AN - SCOPUS:81555219443

SN - 0169-4332

VL - 258

SP - 1689

EP - 1698

JO - Applied Surface Science

JF - Applied Surface Science

IS - 5

ER -

Analysis of machining characteristics in electrochemical etching using laser masking

Abstract

Keywords

UN SDGs

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