Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

  • Xuan Luc Le
  • , Kihoon Kim
  • , Sung Hoon Choa

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Fingerprint

Dive into the research topics of 'Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer'. Together they form a unique fingerprint.

Material Science

Engineering