Argon plasma treatment on Cu surface for Cu bonding in 3D integration and their characteristics

3D integration enhances RC delay mitigation, improves inter-die bandwidth, and has routing advantages for the next generation integrated circuit technology. To realize the advantages of 3D integration, metallic bonding between different dies or wafers is necessary. So, Cu-to-Cu metallic bonding is, without doubt, a key process needed for 3D integration. In this study, Ar plasma treatment on the Cu surface for Cu thermo-compression bonding temperature less than 400 °C was investigated. Ar plasma treatment on the Cu thin film was performed using a conventional DC sputtering technique. The effect of Cu surface modified by Ar plasma was studied for Cu-to-Cu bonding. Also, the influence of Ar plasma treatment on the Cu surface was evaluated structurally and electrically.