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Aspheric surface metrology: Fringe phase modeling and iterative optimization with radial shearing interferometry

  • Huy Vu
  • , Ba Son Nguyen
  • , Seunghoo Lee
  • , Tri Nguyen
  • , Tiendung Vu
  • , Joohyung Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We propose a nonnull testing method for aspheric surfaces using a radial shearing interferometer (RSI) combined with iterative optimization. The RSI minimizes the departure of aspheric surfaces, making it suitable for surfaces with large asphericity due to its self-reference property. First, we modeled the RSI using ray-tracing software, allowing the resulting interference fringes to be easily revealed. An experimental setup was constructed based on this modeling, and the corresponding interference fringes were collected. The modeling's geometrical constraints and aspheric parameters were iteratively optimized to achieve good agreement between the departure wavefronts in the experiment and the simulation. We identified the positions and parameters in the modeling that represent the experimental setup, enabling the accurate measurement of the waviness of the aspheric surface under test.

Original languageEnglish
Title of host publicationModeling Aspects in Optical Metrology X
EditorsBernd Bodermann, Karsten Frenner
PublisherSPIE
ISBN (Electronic)9781510690448
DOIs
StatePublished - 8 Aug 2025
Event10th Modeling Aspects in Optical Metrology - Munich, Germany
Duration: 23 Jun 202525 Jun 2025

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume13568
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference10th Modeling Aspects in Optical Metrology
Country/TerritoryGermany
CityMunich
Period23/06/2525/06/25

Keywords

  • Aspheric surface
  • Fringe phase
  • Iterative optimization
  • Radial shearing interferometry

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