@inproceedings{67421257ebf14d4bad093588f657e03d,
title = "Aspheric surface metrology: Fringe phase modeling and iterative optimization with radial shearing interferometry",
abstract = "We propose a nonnull testing method for aspheric surfaces using a radial shearing interferometer (RSI) combined with iterative optimization. The RSI minimizes the departure of aspheric surfaces, making it suitable for surfaces with large asphericity due to its self-reference property. First, we modeled the RSI using ray-tracing software, allowing the resulting interference fringes to be easily revealed. An experimental setup was constructed based on this modeling, and the corresponding interference fringes were collected. The modeling's geometrical constraints and aspheric parameters were iteratively optimized to achieve good agreement between the departure wavefronts in the experiment and the simulation. We identified the positions and parameters in the modeling that represent the experimental setup, enabling the accurate measurement of the waviness of the aspheric surface under test.",
keywords = "Aspheric surface, Fringe phase, Iterative optimization, Radial shearing interferometry",
author = "Huy Vu and Nguyen, \{Ba Son\} and Seunghoo Lee and Tri Nguyen and Tiendung Vu and Joohyung Lee",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; 10th Modeling Aspects in Optical Metrology ; Conference date: 23-06-2025 Through 25-06-2025",
year = "2025",
month = aug,
day = "8",
doi = "10.1117/12.3062302",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Bernd Bodermann and Karsten Frenner",
booktitle = "Modeling Aspects in Optical Metrology X",
}