Barrier height enhancement in Pt/n-Ge Schottky junction with a ZnO interlayer prepared by atomic layer deposition

Hogyoung Kim, Myeong Jun Jung, Byung Joon Choi

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Abstract

The Pt/Ge Schottky junctions were fabricated with an atomic layer deposition (ALD)-grown ZnO interlayer (IL) and the interfacial properties of Pt/ZnO/Ge Schottky junctions were characterized. The forward current characteristics showed that the barrier height for Pt/ZnO/Ge junction was higher than that for the Pt/Ge junction, associated with the improved interfacial quality. The thermionic field emission model was a suitable transport mechanism for the reverse current characteristics for Pt/ZnO/Ge junction. High reverse current values for Pt/Ge junction would be due to the positive fixed charges and/or donor-like surface states. Higher barrier height and lower reverse leakage current indicate better Schottky diode characteristics for the Pt/ZnO/Ge junction. It could be inferred from the results that ALD-grown ZnO IL improved the interfacial quality of Pt/Ge Schottky junction.

Original languageEnglish
Pages (from-to)241-246
Number of pages6
JournalJournal of the Korean Physical Society
Volume81
Issue number3
DOIs
StatePublished - Aug 2022

Keywords

  • Interfacial quality
  • Pt/Ge Schottky junctions
  • Thermionic field emission
  • ZnO interlayer

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