Characterization of a multi-layered MEMS pressure sensor using piezoresistive silicon nanowire within large measurable strain range

Liang Lou, Songsong Zhang, Woo Tae Park, Lishiah Lim, Dim Lee Kwong, Chengkuo Lee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

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