CMOS 기반의 집적 회로 및 시스템을 위한극저온 측정 환경 구축

In this work, we introduce a complementary metal-oxide semiconductor(CMOS)-based integrated circuit(IC) measurement set-up for quantum computer control and read-out using a cryogenic refrigerator. CMOS circuits have to operate at extremely low temperatures of 3 to 5 K for qubit stability and noise reduction. The existing cryogenic measurement system is liquid helium quenching, which is expensive due to the long-term use of expendable resources. Therefore, we describe a cryogenic measurement system based on a closed cycle refrigerator (CCR) that is cost-free even when using helium gas for long periods of time. The refrigerator capable of reaching 4.7 K was built using a Gifford-Mcmahon(G-M) type cryocooler. This is expected to be a cryogenic refrigerator set-up with excellent price competitiveness.