Continuous fabrication of scalable 2-dimensional (2D) micro- and nanostructures by sequential 1D mechanical patterning processes

Jong G. Ok, Ashwin Panday, Taehwa Lee, L. Jay Guo

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

We present a versatile and simple methodology for continuous and scalable 2D micro/nano-structure fabrication via sequential 1D patterning strokes enabled by dynamic nano-inscribing (DNI) and vibrational indentation patterning (VIP) as well as a 'single-stroke' 2D patterning using a DNI tool in VIP.

Original languageEnglish
Pages (from-to)14636-14642
Number of pages7
JournalNanoscale
Volume6
Issue number24
DOIs
StatePublished - 21 Dec 2014

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