Abstract
We present a versatile and simple methodology for continuous and scalable 2D micro/nano-structure fabrication via sequential 1D patterning strokes enabled by dynamic nano-inscribing (DNI) and vibrational indentation patterning (VIP) as well as a 'single-stroke' 2D patterning using a DNI tool in VIP.
Original language | English |
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Pages (from-to) | 14636-14642 |
Number of pages | 7 |
Journal | Nanoscale |
Volume | 6 |
Issue number | 24 |
DOIs | |
State | Published - 21 Dec 2014 |