Correction of rotational inaccuracy in lateral shearing interferometry for freeform measurement

  • Hyug Gyo Rhee
  • , Young Sik Ghim
  • , Joohyung Lee
  • , Ho Soon Yang
  • , Yun Woo Lee

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

A lateral shearing interferometer has an advantage over previous wavefront measuring interferometers since it requires no reference. Therefore the lateral shearing interferometer can be a powerful solution to measure a freeform surface. It, however, has some issues to be resolved before it can be implemented. One of them is the orthogonality problem between two shearing directions in LSI. Previous wavefront reconstruction algorithms assume that the shearing directions are perfectly orthogonal to each other and lateral shear is obtained simultaneously in the sagittal and tangential directions. For practical LSI, however, there is no way to guarantee perfect orthogonality between two shearing directions. Motivated by this, we propose a new algorithm that is able to compensate the rotational inaccuracy. The mathematical model is derived in this paper. Computer simulations and experiments are also displayed to verify our algorithm.

Original languageEnglish
Pages (from-to)24799-24808
Number of pages10
JournalOptics Express
Volume21
Issue number21
DOIs
StatePublished - 21 Oct 2013

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