Deposition of LiNbO3 thin films for selective etching

Hyun Jun Kim; Dal Young Kim; Jong Yoon Ha; Chong Yun Kang; Man Young Sung; Bong Hee Cho; Seok Jin Yoon; Hyun Jai Kim

doi:10.1007/s10832-006-0467-z

Deposition of LiNbO₃ thin films for selective etching

Hyun Jun Kim, Dal Young Kim, Jong Yoon Ha, Chong Yun Kang, Man Young Sung, Bong Hee Cho, Seok Jin Yoon, Hyun Jai Kim

Dept. of Optometry

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Ferroelectric lithium niobate (LiNbO₃) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO₃ thin film. The LiNbO₃ thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).

Original language	English
Pages (from-to)	933-935
Number of pages	3
Journal	Journal of Electroceramics
Volume	17
Issue number	2-4
DOIs	https://doi.org/10.1007/s10832-006-0467-z
State	Published - Dec 2006

Keywords

Ferroelectric
LiNbO
PLD
Selective etching

Access to Document

10.1007/s10832-006-0467-z

Cite this

@article{a18e4233a8584bf28f30cd2fe58bb63c,

title = "Deposition of LiNbO3 thin films for selective etching",

abstract = "Ferroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).",

keywords = "Ferroelectric, LiNbO, PLD, Selective etching",

author = "Kim, \{Hyun Jun\} and Kim, \{Dal Young\} and Ha, \{Jong Yoon\} and Kang, \{Chong Yun\} and Sung, \{Man Young\} and Cho, \{Bong Hee\} and Yoon, \{Seok Jin\} and Kim, \{Hyun Jai\}",

year = "2006",

month = dec,

doi = "10.1007/s10832-006-0467-z",

language = "English",

volume = "17",

pages = "933--935",

journal = "Journal of Electroceramics",

issn = "1385-3449",

number = "2-4",

}

TY - JOUR

T1 - Deposition of LiNbO3 thin films for selective etching

AU - Kim, Hyun Jun

AU - Kim, Dal Young

AU - Ha, Jong Yoon

AU - Kang, Chong Yun

AU - Sung, Man Young

AU - Cho, Bong Hee

AU - Yoon, Seok Jin

AU - Kim, Hyun Jai

PY - 2006/12

Y1 - 2006/12

N2 - Ferroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).

AB - Ferroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).

KW - Ferroelectric

KW - LiNbO

KW - PLD

KW - Selective etching

UR - http://www.scopus.com/inward/record.url?scp=33847201206&partnerID=8YFLogxK

U2 - 10.1007/s10832-006-0467-z

DO - 10.1007/s10832-006-0467-z

M3 - Article

AN - SCOPUS:33847201206

SN - 1385-3449

VL - 17

SP - 933

EP - 935

JO - Journal of Electroceramics

JF - Journal of Electroceramics

IS - 2-4

ER -

Deposition of LiNbO₃ thin films for selective etching

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this