@inproceedings{75adbbfb063649e9a9fe5e0ed18baffa,
title = "Design and control of a nano-precision multi-axis vertical mask aligner",
author = "Kim, \{Hyo Young\} and Gweon, \{D. G.\} and Kim, \{J. J.\} and Ahn, \{D. H.\}",
year = "2009",
language = "English",
isbn = "9781887706520",
series = "Proceedings of the 24th Annual Meeting of the American Society for Precision Engineering, ASPE 2009",
booktitle = "Proceedings of the 24th Annual Meeting of the American Society for Precision Engineering, ASPE 2009",
note = "24th Annual Meeting of the American Society for Precision Engineering, ASPE 2009 ; Conference date: 04-10-2009 Through 09-10-2009",
}