TY - JOUR
T1 - Design and fabrication of a novel flowmeter with corrugated structure
AU - Choi, Dae Keun
AU - Lee, Sang Hoon
PY - 2012/10
Y1 - 2012/10
N2 - We designed, fabricated and evaluate the novel air flowmeter with corrugation structure for the detection of low air velocity. For measuring the low air flow rate, the sensitivity related factors, the air drag force and the output signal, should be improved at the given air flow. The device has the paddle structure, and the maximized air drag force is obtained with vertical air flow. The output signal is also improved with the corrugation structure and measured with piezoresistive detection. The low air flow rate with less than 1 m/s air velocity are applied, and the fabricated flowmeter with corrugation structure shows the better sensitivity and the response time than those of flat one. Various experiments about repeated measurements also show the stabilized signals.
AB - We designed, fabricated and evaluate the novel air flowmeter with corrugation structure for the detection of low air velocity. For measuring the low air flow rate, the sensitivity related factors, the air drag force and the output signal, should be improved at the given air flow. The device has the paddle structure, and the maximized air drag force is obtained with vertical air flow. The output signal is also improved with the corrugation structure and measured with piezoresistive detection. The low air flow rate with less than 1 m/s air velocity are applied, and the fabricated flowmeter with corrugation structure shows the better sensitivity and the response time than those of flat one. Various experiments about repeated measurements also show the stabilized signals.
KW - Corrugation structure
KW - Flowmeter
KW - MEMS
KW - Piezoresistive detection
UR - http://www.scopus.com/inward/record.url?scp=84865596695&partnerID=8YFLogxK
U2 - 10.1016/j.mee.2012.07.093
DO - 10.1016/j.mee.2012.07.093
M3 - Article
AN - SCOPUS:84865596695
SN - 0167-9317
VL - 98
SP - 477
EP - 482
JO - Microelectronic Engineering
JF - Microelectronic Engineering
ER -