@inproceedings{9a3cb35cd2f24f168942ba7c0a77ef75,
title = "Design, fabrication and characterization of ultra miniature piezoresistive pressure sensors for medical implants",
abstract = "Pressure sensors using MEMS technology have been advanced due to their low cost, small size and high sensitivity, which is an advantage for biomedical applications. In this paper,silicon nanowire was proposed to be used as the piezoresistors due to the high sensitivity [1][2].The sensors were designed, and characterized for the use of medical devices for pressure monitoring. The pressure sensor size is 2mm ×2mm with embedded SiNWs of 90nm ×150nm been fabricated. Additionally, the sensitivity of 0.0024 Pa-1 pressure sensor has been demonstrated.",
keywords = "Piezoresistive, Silicon nanowire",
author = "Lim, \{Li Shiah\} and Park, \{Woo Tae\} and Liang Lou and Feng, \{Han Hua\} and Pushpapraj Singh",
year = "2011",
doi = "10.4028/www.scientific.net/AMR.254.94",
language = "English",
isbn = "9783037851456",
series = "Advanced Materials Research",
pages = "94--98",
booktitle = "NEMS/MEMS Technology and Devices",
note = "International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS ; Conference date: 26-06-2011 Through 01-07-2011",
}