Design of a 6-DOF VCM-driven micro stage

Jae Heon Jeong; Myeong Hyeon Kim; Siwoong Woo; Da Hoon Ahn; Dong Pyo Hong

doi:10.4028/www.scientific.net/AMM.532.3

Design of a 6-DOF VCM-driven micro stage

Jae Heon Jeong, Myeong Hyeon Kim, Siwoong Woo, Da Hoon Ahn, Dong Pyo Hong

Dept. of Mechanical System and Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents design of micro stage performing 6 degree-of-freedom (DOF) motions, which actuated by voice coil motor (VCM). The VCMs generate forces to perform in-plane motions and out-of-plane motions. The stage is supported by springs for compensating mass of the moving part of the stage and the stiffness of the springs has been chosen to meet the moving range requirement and to have high resonant frequency at the same time. Moving magnet type has been selected against moving coil type due to few merits of the type. The size of the stage is 380 X 380 X 60 mm³ and the motions are measured by laser interferometer and gap sensors.

Original language	English
Title of host publication	Mechatronics and Applied Mechanics III
Publisher	Trans Tech Publications
Pages	3-6
Number of pages	4
ISBN (Print)	9783038350309
DOIs	https://doi.org/10.4028/www.scientific.net/AMM.532.3
State	Published - 2014
Event	2013 3rd International Conference on Mechatronics and Applied Mechanics, ICMAM 2013 - Paris, France Duration: 27 Dec 2013 → 28 Dec 2013

Publication series

Name	Applied Mechanics and Materials
Volume	532
ISSN (Print)	1660-9336
ISSN (Electronic)	1662-7482

Conference

Conference	2013 3rd International Conference on Mechatronics and Applied Mechanics, ICMAM 2013
Country/Territory	France
City	Paris
Period	27/12/13 → 28/12/13

Keywords

6-degree of freedom
Nano positioning
Spring
Stage
Voice coil motor

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10.4028/www.scientific.net/AMM.532.3

Cite this

@inproceedings{fd444a8733ad41038a0430227be7e0fc,

title = "Design of a 6-DOF VCM-driven micro stage",

abstract = "This paper presents design of micro stage performing 6 degree-of-freedom (DOF) motions, which actuated by voice coil motor (VCM). The VCMs generate forces to perform in-plane motions and out-of-plane motions. The stage is supported by springs for compensating mass of the moving part of the stage and the stiffness of the springs has been chosen to meet the moving range requirement and to have high resonant frequency at the same time. Moving magnet type has been selected against moving coil type due to few merits of the type. The size of the stage is 380 X 380 X 60 mm3 and the motions are measured by laser interferometer and gap sensors.",

keywords = "6-degree of freedom, Nano positioning, Spring, Stage, Voice coil motor",

author = "Jeong, \{Jae Heon\} and Kim, \{Myeong Hyeon\} and Siwoong Woo and Ahn, \{Da Hoon\} and Hong, \{Dong Pyo\}",

year = "2014",

doi = "10.4028/www.scientific.net/AMM.532.3",

language = "English",

isbn = "9783038350309",

series = "Applied Mechanics and Materials",

publisher = "Trans Tech Publications",

pages = "3--6",

booktitle = "Mechatronics and Applied Mechanics III",

note = "2013 3rd International Conference on Mechatronics and Applied Mechanics, ICMAM 2013 ; Conference date: 27-12-2013 Through 28-12-2013",

}

Jeong, JH, Kim, MH, Woo, S, Ahn, DH & Hong, DP 2014, Design of a 6-DOF VCM-driven micro stage. in Mechatronics and Applied Mechanics III. Applied Mechanics and Materials, vol. 532, Trans Tech Publications, pp. 3-6, 2013 3rd International Conference on Mechatronics and Applied Mechanics, ICMAM 2013, Paris, France, 27/12/13. https://doi.org/10.4028/www.scientific.net/AMM.532.3

TY - GEN

T1 - Design of a 6-DOF VCM-driven micro stage

AU - Jeong, Jae Heon

AU - Kim, Myeong Hyeon

AU - Woo, Siwoong

AU - Ahn, Da Hoon

AU - Hong, Dong Pyo

PY - 2014

Y1 - 2014

N2 - This paper presents design of micro stage performing 6 degree-of-freedom (DOF) motions, which actuated by voice coil motor (VCM). The VCMs generate forces to perform in-plane motions and out-of-plane motions. The stage is supported by springs for compensating mass of the moving part of the stage and the stiffness of the springs has been chosen to meet the moving range requirement and to have high resonant frequency at the same time. Moving magnet type has been selected against moving coil type due to few merits of the type. The size of the stage is 380 X 380 X 60 mm3 and the motions are measured by laser interferometer and gap sensors.

AB - This paper presents design of micro stage performing 6 degree-of-freedom (DOF) motions, which actuated by voice coil motor (VCM). The VCMs generate forces to perform in-plane motions and out-of-plane motions. The stage is supported by springs for compensating mass of the moving part of the stage and the stiffness of the springs has been chosen to meet the moving range requirement and to have high resonant frequency at the same time. Moving magnet type has been selected against moving coil type due to few merits of the type. The size of the stage is 380 X 380 X 60 mm3 and the motions are measured by laser interferometer and gap sensors.

KW - 6-degree of freedom

KW - Nano positioning

KW - Spring

KW - Stage

KW - Voice coil motor

UR - http://www.scopus.com/inward/record.url?scp=84896071121&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMM.532.3

DO - 10.4028/www.scientific.net/AMM.532.3

M3 - Conference contribution

AN - SCOPUS:84896071121

SN - 9783038350309

T3 - Applied Mechanics and Materials

SP - 3

EP - 6

BT - Mechatronics and Applied Mechanics III

PB - Trans Tech Publications

T2 - 2013 3rd International Conference on Mechatronics and Applied Mechanics, ICMAM 2013

Y2 - 27 December 2013 through 28 December 2013

ER -

Design of a 6-DOF VCM-driven micro stage

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Keywords

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