Design of a six-degree-of-freedom motion fine stage driven by voice coil motors with flexural guides

Jae heon Jeong; Myeong hyeon Kim; Siwoong Woo; Dae gab Gweon; Dahoon Ahn; Dongpyo Hong

doi:10.1007/s12541-015-0027-z

Design of a six-degree-of-freedom motion fine stage driven by voice coil motors with flexural guides

Jae heon Jeong, Myeong hyeon Kim, Siwoong Woo, Dae gab Gweon, Dahoon Ahn, Dongpyo Hong

Dept. of Mechanical System and Design Engineering

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

Fine stage has been used in various fields of industries. Numerous types of fine stages have been researched and developed. In this paper, a fine stage using voice coil motors as actuators with flexural guides was proposed. The fine stage was mainly designed to eliminate coupled motion by location of VCM and using rotational hinges on flexural guides. System specification was determined by required performance. With the system specification, VCM was optimally designed to satisfy the specification. A flexural guide was conceptually designed to perform six-degree-of-freedom motions.

Original language	English
Pages (from-to)	203-207
Number of pages	5
Journal	International Journal of Precision Engineering and Manufacturing
Volume	16
Issue number	1
DOIs	https://doi.org/10.1007/s12541-015-0027-z
State	Published - Jan 2015

Keywords

Fine stage
Flexure
Modeling
Optimization
VCM

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title = "Design of a six-degree-of-freedom motion fine stage driven by voice coil motors with flexural guides",

abstract = "Fine stage has been used in various fields of industries. Numerous types of fine stages have been researched and developed. In this paper, a fine stage using voice coil motors as actuators with flexural guides was proposed. The fine stage was mainly designed to eliminate coupled motion by location of VCM and using rotational hinges on flexural guides. System specification was determined by required performance. With the system specification, VCM was optimally designed to satisfy the specification. A flexural guide was conceptually designed to perform six-degree-of-freedom motions.",

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author = "Jeong, \{Jae heon\} and Kim, \{Myeong hyeon\} and Siwoong Woo and Gweon, \{Dae gab\} and Dahoon Ahn and Dongpyo Hong",

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AU - Gweon, Dae gab

AU - Ahn, Dahoon

AU - Hong, Dongpyo

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AB - Fine stage has been used in various fields of industries. Numerous types of fine stages have been researched and developed. In this paper, a fine stage using voice coil motors as actuators with flexural guides was proposed. The fine stage was mainly designed to eliminate coupled motion by location of VCM and using rotational hinges on flexural guides. System specification was determined by required performance. With the system specification, VCM was optimally designed to satisfy the specification. A flexural guide was conceptually designed to perform six-degree-of-freedom motions.

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KW - Flexure

KW - Modeling

KW - Optimization

KW - VCM

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ER -

Design of a six-degree-of-freedom motion fine stage driven by voice coil motors with flexural guides

Abstract

Keywords

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