Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage

Dahoon Ahn; Hyunchang Kim; Daegab Gweon; Sunho Lee; Woohyuck Choi; Sungtaek Baek; Sanghoon Lee; Junkyu Park

Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage

Dahoon Ahn, Hyunchang Kim, Daegab Gweon, Sunho Lee, Woohyuck Choi, Sungtaek Baek, Sanghoon Lee, Junkyu Park

Dept. of Mechanical System and Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Original language	English
Title of host publication	Proceedings - ASPE 2010 Annual Meeting
Pages	223-225
Number of pages	3
State	Published - 2010
Event	25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 - Atlanta, GA, United States Duration: 31 Oct 2010 → 4 Nov 2010

Publication series

Name	Proceedings - ASPE 2010 Annual Meeting
Volume	50

Conference

Conference	25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010
Country/Territory	United States
City	Atlanta, GA
Period	31/10/10 → 4/11/10

Cite this

@inproceedings{fafaa920a0074995ab233a58252e7e36,

title = "Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage",

author = "Dahoon Ahn and Hyunchang Kim and Daegab Gweon and Sunho Lee and Woohyuck Choi and Sungtaek Baek and Sanghoon Lee and Junkyu Park",

year = "2010",

language = "English",

isbn = "9781887706568",

series = "Proceedings - ASPE 2010 Annual Meeting",

pages = "223--225",

booktitle = "Proceedings - ASPE 2010 Annual Meeting",

note = "25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 ; Conference date: 31-10-2010 Through 04-11-2010",

}

Ahn, D, Kim, H, Gweon, D, Lee, S, Choi, W, Baek, S, Lee, S & Park, J 2010, Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage. in Proceedings - ASPE 2010 Annual Meeting. Proceedings - ASPE 2010 Annual Meeting, vol. 50, pp. 223-225, 25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010, Atlanta, GA, United States, 31/10/10.

TY - GEN

T1 - Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage

AU - Ahn, Dahoon

AU - Kim, Hyunchang

AU - Gweon, Daegab

AU - Lee, Sunho

AU - Choi, Woohyuck

AU - Baek, Sungtaek

AU - Lee, Sanghoon

AU - Park, Junkyu

PY - 2010

Y1 - 2010

UR - https://www.scopus.com/pages/publications/80052050669

M3 - Conference contribution

AN - SCOPUS:80052050669

SN - 9781887706568

T3 - Proceedings - ASPE 2010 Annual Meeting

SP - 223

EP - 225

BT - Proceedings - ASPE 2010 Annual Meeting

T2 - 25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010

Y2 - 31 October 2010 through 4 November 2010

ER -

Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage

Publication series

Conference

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Cite this