Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage

Dahoon Ahn; Hyunchang Kim; Daegab Gweon; Sunho Lee; Woohyuck Choi; Sungtaek Baek; Sanghoon Lee; Junkyu Park

Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage

Dahoon Ahn
, Hyunchang Kim
, Daegab Gweon
, Sunho Lee
, Woohyuck Choi
, Sungtaek Baek
, Sanghoon Lee
, Junkyu Park

Dept. of Mechanical System and Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Original language	English
Title of host publication	Proceedings - ASPE 2010 Annual Meeting
Pages	223-225
Number of pages	3
State	Published - 2010
Event	25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 - Atlanta, GA, United States Duration: 31 Oct 2010 → 4 Nov 2010

Publication series

Name	Proceedings - ASPE 2010 Annual Meeting
Volume	50

Conference

Conference	25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010
Country/Territory	United States
City	Atlanta, GA
Period	31/10/10 → 4/11/10

Cite this

@inproceedings{fafaa920a0074995ab233a58252e7e36,

title = "Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage",

author = "Dahoon Ahn and Hyunchang Kim and Daegab Gweon and Sunho Lee and Woohyuck Choi and Sungtaek Baek and Sanghoon Lee and Junkyu Park",

year = "2010",

language = "English",

isbn = "9781887706568",

series = "Proceedings - ASPE 2010 Annual Meeting",

pages = "223--225",

booktitle = "Proceedings - ASPE 2010 Annual Meeting",

note = "25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 ; Conference date: 31-10-2010 Through 04-11-2010",

}

Ahn, D, Kim, H, Gweon, D, Lee, S, Choi, W, Baek, S, Lee, S & Park, J 2010, Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage. in Proceedings - ASPE 2010 Annual Meeting. Proceedings - ASPE 2010 Annual Meeting, vol. 50, pp. 223-225, 25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010, Atlanta, GA, United States, 31/10/10.

TY - GEN

T1 - Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage

AU - Ahn, Dahoon

AU - Kim, Hyunchang

AU - Gweon, Daegab

AU - Lee, Sunho

AU - Choi, Woohyuck

AU - Baek, Sungtaek

AU - Lee, Sanghoon

AU - Park, Junkyu

PY - 2010

Y1 - 2010

UR - https://www.scopus.com/pages/publications/80052050669

M3 - Conference contribution

AN - SCOPUS:80052050669

SN - 9781887706568

T3 - Proceedings - ASPE 2010 Annual Meeting

SP - 223

EP - 225

BT - Proceedings - ASPE 2010 Annual Meeting

T2 - 25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010

Y2 - 31 October 2010 through 4 November 2010

ER -

Design of flexure hinge mechanism for dynamic yaw control of FPD lithography stage

Publication series

Conference

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Cite this