@inproceedings{7ee6ccad53f042868072da4c0ab344e8,
title = "Design of novel 3-DOF nano precision stage",
author = "Kim, \{Hyo Young\} and Ahn, \{D. H.\} and Chun, \{B. S.\} and Gweon, \{D. G.\}",
year = "2010",
language = "English",
isbn = "9781887706568",
series = "Proceedings - ASPE 2010 Annual Meeting",
pages = "242--245",
booktitle = "Proceedings - ASPE 2010 Annual Meeting",
note = "25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 ; Conference date: 31-10-2010 Through 04-11-2010",
}