Design of Piezo-Flexure stage for machining error compensation

Recently, there is an increasing demand for a machining technology capable of improving productivity in a machining industry that requires large-sized products such as aircraft and automobiles. In particular, robot-based machining technology has been studied in the field of cutting-edge materials machining and aviation parts because of its flexibility and high space efficiency compared to conventional machining equipment. However, the machining equipment using robots is vulnerable to vibrations generated during machining due to the low rigidity of the robot and has a large machining error compared to conventional machining equipment. As the machining error degrades the machining quality and degrades the durability of the machine, there is a need for a technology that can improve the machining error. In this study, we propose a flexure stage with piezo actuator to compensate for the low rigidity of the robot. Piezo-flexure stage is a high rigidity and high precision stage that can actuate spindles. It is a system for compensating for machining errors in robot machining.