@inproceedings{6125f844bc4d45a5a63eb7ef70aa908c,
title = "Developing high sensitivity biomass sensor using Lam{\'e} mode square resonator",
abstract = "In this paper, a new cost-effective and reliable high performance biomass sensor is presented. Compared to previous biomass sensors, the developed sensor shows a potential to detect smaller biological agents by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lame bulk acoustic resonant mode at a frequency of 37.8 MHz, with quality factor of 10,000 and the mass sensitivity of-400 Hz/pg.",
keywords = "Biomass sensor, Capacitive transducer, High quality factor, Mass sensitivity, Motional resistance",
author = "Amir Heidari and Yoon, \{Yong Jin\} and Park, \{Woo Tae\} and Lin, \{Julius Tsai Ming\}",
year = "2011",
doi = "10.4028/www.scientific.net/AMR.254.46",
language = "English",
isbn = "9783037851456",
series = "Advanced Materials Research",
pages = "46--49",
booktitle = "NEMS/MEMS Technology and Devices",
note = "International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS ; Conference date: 26-06-2011 Through 01-07-2011",
}