TY - GEN
T1 - Development and optimization of a novel 3-DOF precision flexure stage
AU - Kim, Hyo Young
AU - Ahn, Da Hoon
AU - Chun, Byung Seon
AU - Gweon, Dae Gab
PY - 2010
Y1 - 2010
N2 - This article presents a novel concept design and optimal design of an ultra-precision XYθz flexure and PZT stage with nanometer accuracy. The stage consists of a regular triangle monolithic flexure mechanism with three piezoelectric actuators, and the stage uses a parallel mechanism. Since the relationship between the variables of the hinge parameters and system performances are complicated, it is very difficult to set design variables manually. Therefore, optimal design is used. Using the optimal design results, a FEM simulation was performed. The stage was designed to simultaneously attain ±50um in the X and Y directions and ±0.025° in the yaw direction, and have a first resonant frequency of 207 Hz in the yaw direction. The main purpose of this novel stage is to design appropriate measurement equipment; for biological specimens in particular, the stage was designed as a hollow type and with a compact size (330 mm x 330 mm x 50 mm).
AB - This article presents a novel concept design and optimal design of an ultra-precision XYθz flexure and PZT stage with nanometer accuracy. The stage consists of a regular triangle monolithic flexure mechanism with three piezoelectric actuators, and the stage uses a parallel mechanism. Since the relationship between the variables of the hinge parameters and system performances are complicated, it is very difficult to set design variables manually. Therefore, optimal design is used. Using the optimal design results, a FEM simulation was performed. The stage was designed to simultaneously attain ±50um in the X and Y directions and ±0.025° in the yaw direction, and have a first resonant frequency of 207 Hz in the yaw direction. The main purpose of this novel stage is to design appropriate measurement equipment; for biological specimens in particular, the stage was designed as a hollow type and with a compact size (330 mm x 330 mm x 50 mm).
UR - http://www.scopus.com/inward/record.url?scp=79951832256&partnerID=8YFLogxK
U2 - 10.1109/NANO.2010.5697992
DO - 10.1109/NANO.2010.5697992
M3 - Conference contribution
AN - SCOPUS:79951832256
SN - 9781424470334
T3 - 2010 10th IEEE Conference on Nanotechnology, NANO 2010
SP - 903
EP - 906
BT - 2010 10th IEEE Conference on Nanotechnology, NANO 2010
T2 - 2010 10th IEEE Conference on Nanotechnology, NANO 2010
Y2 - 17 August 2010 through 20 August 2010
ER -