Development of a fully automated desktop chemical vapor deposition system for programmable and controlled carbon nanotube growth

Ju Hyun Ahn, Minho Na, Sungkwan Koo, Hyunsoo Chun, Inhwan Kim, Jong Won Hur, Jae Hyuk Lee, Jong G. Ok

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We have rationally designed and developed a fully automated desktop furnace system that enables programmable chemical vapour deposition growth of carbon nanotubes with controlled height, density, and pattern architecture. Comprising several essential components involving a heating furnace, mass flowmeters, and computer controller, the developed system realizes controlled and practical carbon nanotube growth without resort to expensive and ponderous instruments. By programming, modifying, and loading the reusable recipes in the developed system, systematic and reproducible growths of carbon nanotubes with desired morphology and dimension can be performed. Growth results with controlled height, density, and pattern are demonstrated through the actual operations, confirming the validity and usefulness of the developed system towards various practical applications.

Original languageEnglish
Article number11
JournalMicro and Nano Systems Letters
Volume7
Issue number1
DOIs
StatePublished - 1 Dec 2019

Keywords

  • Automated control
  • Carbon nanotube
  • Chemical vapor deposition
  • Desktop system
  • Furnace
  • Micropattern
  • Nanopattern
  • Programmable growth recipe

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