@inproceedings{c1b94688747c418881588c56f07fec58,
title = "Diagnosis model of radio frequency impedance matching in plasma equipment by using neural network and wavelets",
abstract = "A new calibration model for plasma diagnosis was constructed by combining radio frequency impedance match data, wavelet, and neural network. A total of 30 fault symptoms were simulated with the variations in the four process parameters. Both discrete wavelet transformation (DWT) and continuous wavelet transformation (CWT) were utilized to filter the sensor information. Three types of diagnosis models (raw-, DWT-, and CWT-based models) were constructed. The comparisons revealed that the improvement in the prediction performance of DWT and CWT data models over the raw data model were about 42\% and 30\%, respectively.",
author = "Byungwhan Kim and Park, \{Jae Young\} and Kim, \{Dong Hwan\} and Han, \{Seung Soo\}",
year = "2006",
doi = "10.1007/11801603\_121",
language = "English",
isbn = "3540366679",
series = "Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)",
publisher = "Springer Verlag",
pages = "995--999",
booktitle = "PRICAI 2006",
note = "9th Pacific Rim International Conference on Artificial Intelligence ; Conference date: 07-08-2006 Through 11-08-2006",
}