Abstract
This paper presents a new design of silicon-based biocalorimeter made with dual thermopiles and a microfluidic channel introducing a splitting and mixing flow. The dualthermopile was fabricated with chromium and copper using microelectromechanical system (MEMS) technique, and the microfluidic channel was made of PDMS using a soft-lithography. Each thermopile consists of 26 Cr/Cu thermocouple pairs. The sensitivity of each thermocouple is 20.0 μCV/K and the total sensitivity of thermopile is 519.2 μV/K. This dual-thermopile system enables biocalorimeter to acquire the reliable data in a rapid and convenient manner because it detects biochemical reaction and reference temperature simultaneously.
| Original language | English |
|---|---|
| Title of host publication | The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 |
| Pages | 740-743 |
| Number of pages | 4 |
| DOIs | |
| State | Published - 2007 |
| Event | 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States Duration: 28 Oct 2007 → 31 Oct 2007 |
Publication series
| Name | Proceedings of IEEE Sensors |
|---|
Conference
| Conference | 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 |
|---|---|
| Country/Territory | United States |
| City | Atlanta, GA |
| Period | 28/10/07 → 31/10/07 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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