Abstract
This article presents a new design of a silicon-based microcalorimeter made with dual thermopiles and a microchannel. The dual thermopile was fabricated with chromium and copper using a microelectromechanical system (MEMS) technique, and the microchannel was made of PDMS using soft-lithography. Each thermopile consists of 26 thermocouple pairs and 50 μm wide electrodes. The total sensitivity of thermopile is 428 μV/K. The dual thermopile system enables the microcalorimeter to acquire reliable data in a rapid and convenient manner because it detects the reaction and reference temperatures simultaneously. This self-compensation allows our device to analyze a few microliters of sample solution without the need for a surrounding adiabatic vacuum.
Original language | English |
---|---|
Pages (from-to) | 255-262 |
Number of pages | 8 |
Journal | Microfluidics and Nanofluidics |
Volume | 5 |
Issue number | 2 |
DOIs | |
State | Published - Aug 2008 |
Keywords
- Biochemical reaction
- Calorimeter
- Dual thermopile
- Microchannel