TY - GEN
T1 - Dynamic focusing technique with magnification adjustment in an electro-optical lense
AU - Kim, Seung Jae
AU - Kim, Dong Hwan
PY - 2011
Y1 - 2011
N2 - In a scanning electron microscope, secondary electrons emitted from the specimen are collected at PMT, later being converted into electron signal to form an image. Usually, most surface perpendicular to the electron beam can be easily measured, however, side surface is not possible to be measured without rotating the specimen. With this forceful rotation (tilt), the original focusing depth is changed, which makes the image blurry or mismatched with original specimen. In this article, an adjustment technique is introduced, yielding the consistent image acquisition for various changes of focusing depth due to the specimen tilting.
AB - In a scanning electron microscope, secondary electrons emitted from the specimen are collected at PMT, later being converted into electron signal to form an image. Usually, most surface perpendicular to the electron beam can be easily measured, however, side surface is not possible to be measured without rotating the specimen. With this forceful rotation (tilt), the original focusing depth is changed, which makes the image blurry or mismatched with original specimen. In this article, an adjustment technique is introduced, yielding the consistent image acquisition for various changes of focusing depth due to the specimen tilting.
KW - Dynamics focus
KW - Horizontal Scan
KW - Magnification
KW - Magnification correction
KW - Objective Lens
KW - Scan Line
KW - Scanning Electron Microscope
KW - Vertical Scan
UR - http://www.scopus.com/inward/record.url?scp=84863281027&partnerID=8YFLogxK
U2 - 10.1109/ICSensT.2011.6136990
DO - 10.1109/ICSensT.2011.6136990
M3 - Conference contribution
AN - SCOPUS:84863281027
SN - 9781457701672
T3 - Proceedings of the International Conference on Sensing Technology, ICST
SP - 31
EP - 34
BT - 2011 5th International Conference on Sensing Technology, ICST 2011
T2 - 2011 5th International Conference on Sensing Technology, ICST 2011
Y2 - 28 November 2011 through 1 December 2011
ER -