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Effect of heat transfer on the C49-C54 phase transformation in TiSi
2
thin film
Zhang Lin
, Khin Maung Latt
,
Y. K. Lee
Dept. of Semiconductor Engineering
Research output
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›
peer-review
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2
thin film'. Together they form a unique fingerprint.
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Engineering
Thin Films
100%
Thermal Energy
50%
Gas Molecule
50%
Annealing Process
50%
Sheet Resistance
50%
Phase Formation
50%
Material Science
Thin Films
100%
Annealing
50%
Electrical Resistivity
50%