Effects of in-situ molecular oxygen exposure on the modulation of electrical properties of zinc oxide thin films grown by atomic layer deposition
- Hui Kyung Park
- , Bong Seob Yang
- , Myung Sang Kim
- , Sanghyun Park
- , Jeong Hwan Han
- , Jae Cheol Shin
- , Jaeyeong Heo
- Chonnam National University
- Seoul National University
- Korea Photonics Technology Institute
- Yeungnam University
Research output: Contribution to journal › Article › peer-review
5
Scopus
citations