Abstract
The effects of post-treatment of MgO thin films were investigated on the discharge characteristics of an alternating current plasma display panel. The mechanism of the heat treatment and discharge aging was also studied using scanning electron microscopy (SEM), X-ray diffraction (XRD) and quadrupole mass spectroscopy (QMS). The secondary electron emission coefficient of the MgO films was measured and relation of the changes in the MgO properties to the operation voltage was studied. It was found that the carbon impurity as well as initial carbon concentration reduced drastically in the film.
| Original language | English |
|---|---|
| Pages (from-to) | 687-691 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 19 |
| Issue number | 3 |
| DOIs | |
| State | Published - May 2001 |
| Event | 13th International Vaccum Microelectronics Conference - Guangzhou, China Duration: 14 Aug 2000 → 17 Aug 2000 |