TY - JOUR
T1 - Electrical discharge machining of carbon nanomaterials in air
T2 - Machining characteristics and the advanced field emission applications
AU - Ok, Jong Girl
AU - Kim, Bo Hyun
AU - Chung, Do Kwan
AU - Sung, Woo Yong
AU - Lee, Seung Min
AU - Lee, Se Won
AU - Kim, Wal Jun
AU - Park, Jin Woo
AU - Chu, Chong Nam
AU - Kim, Yong Hyup
PY - 2008/2/1
Y1 - 2008/2/1
N2 - A reliable and precise machining process, electrical discharge machining (EDM), was investigated in depth as a novel method for the engineering of carbon nanomaterials. The machining characteristics of EDM applied to carbon nanomaterials 'in air' were systematically examined using scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HR-TEM), energy-dispersive x-ray spectroscopy (EDS), x-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The EDM process turned out to 'melt' carbon nanomaterials with the thermal energy generated by electrical discharge, which makes both the materially and geometrically unrestricted machining of nanomaterials possible. Since the EDM process conducted in air requires neither direct contact nor chemical agents, it protects the carbon nanomaterial workpieces against physical damage and unnecessary contamination. From this EDM method, several advanced field emission applications including 'top-down' patterning and the creative lateral comb-type triode device were derived, while our previously reported study on emission uniformity enhancement by the EDM method was also referenced. The EDM method has great potential as a clean, effective and practical way to utilize carbon nanomaterials for various uses.
AB - A reliable and precise machining process, electrical discharge machining (EDM), was investigated in depth as a novel method for the engineering of carbon nanomaterials. The machining characteristics of EDM applied to carbon nanomaterials 'in air' were systematically examined using scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HR-TEM), energy-dispersive x-ray spectroscopy (EDS), x-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The EDM process turned out to 'melt' carbon nanomaterials with the thermal energy generated by electrical discharge, which makes both the materially and geometrically unrestricted machining of nanomaterials possible. Since the EDM process conducted in air requires neither direct contact nor chemical agents, it protects the carbon nanomaterial workpieces against physical damage and unnecessary contamination. From this EDM method, several advanced field emission applications including 'top-down' patterning and the creative lateral comb-type triode device were derived, while our previously reported study on emission uniformity enhancement by the EDM method was also referenced. The EDM method has great potential as a clean, effective and practical way to utilize carbon nanomaterials for various uses.
UR - http://www.scopus.com/inward/record.url?scp=42549147823&partnerID=8YFLogxK
U2 - 10.1088/0960-1317/18/2/025007
DO - 10.1088/0960-1317/18/2/025007
M3 - Article
AN - SCOPUS:42549147823
SN - 0960-1317
VL - 18
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 2
M1 - 025007
ER -