Abstract
This paper presents a proof of concept that combines a nano-composite hydrogen detecting sensor and machine-learning technique to achieve accurate and fast detection of hydrogen leakage. The nano-composite hydrogen detecting sensor is fabricated by depositing MoS2 on a SiO2/Si wafer using chemical vapor deposition, followed by forming discrete Pd nanoparticles through DC (Direct current) sputtering. This sensor shows high sensitivity of 2.77 and fast response time of 4 to 5 seconds at room temparature, but has a significant dependency on environmental factors such as temperature, and humidity. A machine learning technique, i.e. random forest, was incorporated to filter out the environmental factors. Experimental results show that the combination, i. e. MiCS-2714 sensor not only retains sensitivity, response time of the nanocomposite but also attains R2 score of 0.994, MSE 0.0506, and the state classification accuracy of 0.979.
| Original language | English |
|---|---|
| Pages (from-to) | 393-398 |
| Number of pages | 6 |
| Journal | Journal of Semiconductor Technology and Science |
| Volume | 24 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1 Oct 2024 |
Keywords
- hydrogen
- molybdenum disulfide
- nanocomposite sensor
- palladium
- Random forest model
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