TY - JOUR
T1 - Enhancing Accuracy of Nanocomposite Hydrogen Sensors in Various Environmental Situations through Machine Learning
AU - Cho, U. Jin
AU - Jeon, Youhyeong
AU - Park, Sung Wook
AU - Kwon, Min Woo
N1 - Publisher Copyright:
© 2024, Institute of Electronics Engineers of Korea. All rights reserved.
PY - 2024/10/1
Y1 - 2024/10/1
N2 - This paper presents a proof of concept that combines a nano-composite hydrogen detecting sensor and machine-learning technique to achieve accurate and fast detection of hydrogen leakage. The nano-composite hydrogen detecting sensor is fabricated by depositing MoS2 on a SiO2/Si wafer using chemical vapor deposition, followed by forming discrete Pd nanoparticles through DC (Direct current) sputtering. This sensor shows high sensitivity of 2.77 and fast response time of 4 to 5 seconds at room temparature, but has a significant dependency on environmental factors such as temperature, and humidity. A machine learning technique, i.e. random forest, was incorporated to filter out the environmental factors. Experimental results show that the combination, i. e. MiCS-2714 sensor not only retains sensitivity, response time of the nanocomposite but also attains R2 score of 0.994, MSE 0.0506, and the state classification accuracy of 0.979.
AB - This paper presents a proof of concept that combines a nano-composite hydrogen detecting sensor and machine-learning technique to achieve accurate and fast detection of hydrogen leakage. The nano-composite hydrogen detecting sensor is fabricated by depositing MoS2 on a SiO2/Si wafer using chemical vapor deposition, followed by forming discrete Pd nanoparticles through DC (Direct current) sputtering. This sensor shows high sensitivity of 2.77 and fast response time of 4 to 5 seconds at room temparature, but has a significant dependency on environmental factors such as temperature, and humidity. A machine learning technique, i.e. random forest, was incorporated to filter out the environmental factors. Experimental results show that the combination, i. e. MiCS-2714 sensor not only retains sensitivity, response time of the nanocomposite but also attains R2 score of 0.994, MSE 0.0506, and the state classification accuracy of 0.979.
KW - hydrogen
KW - molybdenum disulfide
KW - nanocomposite sensor
KW - palladium
KW - Random forest model
UR - https://www.scopus.com/pages/publications/85208634305
U2 - 10.5573/JSTS.2024.24.5.393
DO - 10.5573/JSTS.2024.24.5.393
M3 - Article
AN - SCOPUS:85208634305
SN - 1598-1657
VL - 24
SP - 393
EP - 398
JO - Journal of Semiconductor Technology and Science
JF - Journal of Semiconductor Technology and Science
IS - 5
ER -