Enhancing Accuracy of Nanocomposite Hydrogen Sensors in Various Environmental Situations through Machine Learning

U. Jin Cho, Youhyeong Jeon, Sung Wook Park, Min Woo Kwon

Research output: Contribution to journalArticlepeer-review

Abstract

This paper presents a proof of concept that combines a nano-composite hydrogen detecting sensor and machine-learning technique to achieve accurate and fast detection of hydrogen leakage. The nano-composite hydrogen detecting sensor is fabricated by depositing MoS2 on a SiO2/Si wafer using chemical vapor deposition, followed by forming discrete Pd nanoparticles through DC (Direct current) sputtering. This sensor shows high sensitivity of 2.77 and fast response time of 4 to 5 seconds at room temparature, but has a significant dependency on environmental factors such as temperature, and humidity. A machine learning technique, i.e. random forest, was incorporated to filter out the environmental factors. Experimental results show that the combination, i. e. MiCS-2714 sensor not only retains sensitivity, response time of the nanocomposite but also attains R2 score of 0.994, MSE 0.0506, and the state classification accuracy of 0.979.

Original languageEnglish
Pages (from-to)393-398
Number of pages6
JournalJournal of Semiconductor Technology and Science
Volume24
Issue number5
DOIs
StatePublished - 1 Oct 2024

Keywords

  • hydrogen
  • molybdenum disulfide
  • nanocomposite sensor
  • palladium
  • Random forest model

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