Erratum: Electrically benign dry-etching method for rutile TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))

Kyung Min Kim; Sang Young Lee; Gyu Jin Choi; Jeong Hwan Han; Cheol Seong Hwang

doi:10.1149/1.3273275

Erratum: Electrically benign dry-etching method for rutile _TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))

Kyung Min Kim, Sang Young Lee, Gyu Jin Choi, Jeong Hwan Han, Cheol Seong Hwang

Dept. of Materials Science & Engineering

Seoul National University

Research output: Contribution to journal › Comment/debate

3 Scopus citations

Original language	English
Pages (from-to)	S1
Journal	Electrochemical and Solid-State Letters
Volume	13
Issue number	3
DOIs	https://doi.org/10.1149/1.3273275
State	Published - 2010

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10.1149/1.3273275

Cite this

@article{10379d2228b847a19b88fa0f66d0b651,

title = "Erratum: Electrically benign dry-etching method for rutile TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))",

author = "Kim, {Kyung Min} and Lee, {Sang Young} and Choi, {Gyu Jin} and Han, {Jeong Hwan} and Hwang, {Cheol Seong}",

year = "2010",

doi = "10.1149/1.3273275",

language = "English",

volume = "13",

pages = "S1",

journal = "Electrochemical and Solid-State Letters",

issn = "1099-0062",

number = "3",

}

TY - JOUR

T1 - Erratum

T2 - Electrically benign dry-etching method for rutile TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))

AU - Kim, Kyung Min

AU - Lee, Sang Young

AU - Choi, Gyu Jin

AU - Han, Jeong Hwan

AU - Hwang, Cheol Seong

PY - 2010

Y1 - 2010

UR - http://www.scopus.com/inward/record.url?scp=74849104577&partnerID=8YFLogxK

U2 - 10.1149/1.3273275

DO - 10.1149/1.3273275

M3 - Comment/debate

AN - SCOPUS:74849104577

SN - 1099-0062

VL - 13

SP - S1

JO - Electrochemical and Solid-State Letters

JF - Electrochemical and Solid-State Letters

IS - 3

ER -

Erratum: Electrically benign dry-etching method for rutile TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))

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Erratum: Electrically benign dry-etching method for rutile _TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))