Erratum: Electrically benign dry-etching method for rutile TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))

Kyung Min Kim; Sang Young Lee; Gyu Jin Choi; Jeong Hwan Han; Cheol Seong Hwang

doi:10.1149/1.3273275

Erratum: Electrically benign dry-etching method for rutile _TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))

Kyung Min Kim
, Sang Young Lee
, Gyu Jin Choi
, Jeong Hwan Han
, Cheol Seong Hwang

Dept. of Materials Science & Engineering

Seoul National University

Research output: Contribution to journal › Comment/debate

3 Scopus citations

Original language	English
Pages (from-to)	S1
Journal	Electrochemical and Solid-State Letters
Volume	13
Issue number	3
DOIs	https://doi.org/10.1149/1.3273275
State	Published - 2010

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10.1149/1.3273275

Cite this

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AU - Lee, Sang Young

AU - Choi, Gyu Jin

AU - Han, Jeong Hwan

AU - Hwang, Cheol Seong

PY - 2010

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Erratum: Electrically benign dry-etching method for rutile TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))

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Erratum: Electrically benign dry-etching method for rutile _TiO2thin-Film capacitors with Ru electrodes (Electrochemical and Solid-State Letters (2010) 13 (G1))