Excimer laser fabrication of polymer microfluidic devices

Joohan Kim; Xianfan Xu

doi:10.2351/1.1585085

Excimer laser fabrication of polymer microfluidic devices

Joohan Kim, Xianfan Xu

Dept. of Mechanical & Automotive Engineering

Purdue University

Research output: Contribution to journal › Article › peer-review

60 Scopus citations

Abstract

The processes for fabricating polymer-based microelectromechanical (MEMS), including machining and bonding techniques, were described. Microfluidic parts were machined on polymers with a KrF excimer laser. Results showed that with the use of polymer materials, the performance of the pump is greatly improved.

Original language	English
Pages (from-to)	255-260
Number of pages	6
Journal	Journal of Laser Applications
Volume	15
Issue number	4
DOIs	https://doi.org/10.2351/1.1585085
State	Published - Nov 2003

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abstract = "The processes for fabricating polymer-based microelectromechanical (MEMS), including machining and bonding techniques, were described. Microfluidic parts were machined on polymers with a KrF excimer laser. Results showed that with the use of polymer materials, the performance of the pump is greatly improved.",

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Excimer laser fabrication of polymer microfluidic devices

Abstract

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