Abstract
The processes for fabricating polymer-based microelectromechanical (MEMS), including machining and bonding techniques, were described. Microfluidic parts were machined on polymers with a KrF excimer laser. Results showed that with the use of polymer materials, the performance of the pump is greatly improved.
| Original language | English |
|---|---|
| Pages (from-to) | 255-260 |
| Number of pages | 6 |
| Journal | Journal of Laser Applications |
| Volume | 15 |
| Issue number | 4 |
| DOIs | |
| State | Published - Nov 2003 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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