@inproceedings{8c0f3857a3cd4179ac0196fbc1f750f1,
title = "Fabrication and evaluation of flowmeter with focused-ion-beam system",
abstract = "In this paper, we fabricated and evaluated the piezoresistive type flowmeter with focused-ion-beam (FIB) system. The flowmeter body is made up of the low stress silicon nitride, and the nanometer sized piezoresistive layer is deposited with FIB system for the smaller measuring area. The flowmeter is evaluated in the wind tunnel, and the 0\textasciitilde{}4m/s air flows are applied. Although the sensitivity, ΔR/R shows the negative behavior unlike the conventional piezoresistive layer due to the added materials during the FIB process, the measurement results show the ΔR/R has a suitable sensitivity (-1.04E-2/ms-1) and a rapid response time (0.8sec). Those results represent the fabricated piezoresistive type air flowmeter has the possibility for the small area detection.",
keywords = "Flowmeter, Focused-ion-beam (FIB) system, MEMS, Piezoresistive",
author = "Choi, \{Dae Keun\} and Lee, \{Sang Hoon\}",
year = "2013",
doi = "10.4028/www.scientific.net/AMM.389.324",
language = "English",
isbn = "9783037858158",
series = "Applied Mechanics and Materials",
pages = "324--329",
booktitle = "Materials Technologies, Automation Systems and Information Technologies in Industry",
note = "2013 International Conference on Mechatronic Systems and Materials Application, ICMSMA 2013 ; Conference date: 26-06-2013 Through 27-06-2013",
}