Fabrication and optimization of bimorph micro probes for the measurement of individual biocells

Y. H. Cho; D. Collard; L. Buchaillot; F. Conseil; B. J. Kim

doi:10.1007/s00542-005-0010-1

Fabrication and optimization of bimorph micro probes for the measurement of individual biocells

Y. H. Cho
, D. Collard
, L. Buchaillot
, F. Conseil
, B. J. Kim

School of Mechanical Systems Engineering/ Intelligent Robotics Engineering

The University of Tokyo
Institut d'Electronique de Microélectronique et de Nanotechnologie (IEMN)

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

This paper deals with a novel structure for single-cell characterization which makes use of bimorph thermal actuators combined with electrical sensor device and integrated micro channel. The goal of this device is to capture and characterize individual biocells or micro particles. After analysis of actuation by numerical modeling and simulation, practical fabrication of prototype probes is realized. Finally, we optimize the dimension of cantilevers and integrated parallel probe systems with microfluidic channels.

Original language	English
Pages (from-to)	30-37
Number of pages	8
Journal	Microsystem Technologies
Volume	12
Issue number	1-2 SPEC. ISS.
DOIs	https://doi.org/10.1007/s00542-005-0010-1
State	Published - Dec 2005

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Bimorph micro thermal actuator
Single-cell detection
SU-8

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10.1007/s00542-005-0010-1

Cite this

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abstract = "This paper deals with a novel structure for single-cell characterization which makes use of bimorph thermal actuators combined with electrical sensor device and integrated micro channel. The goal of this device is to capture and characterize individual biocells or micro particles. After analysis of actuation by numerical modeling and simulation, practical fabrication of prototype probes is realized. Finally, we optimize the dimension of cantilevers and integrated parallel probe systems with microfluidic channels.",

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AU - Cho, Y. H.

AU - Collard, D.

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AU - Conseil, F.

AU - Kim, B. J.

PY - 2005/12

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AB - This paper deals with a novel structure for single-cell characterization which makes use of bimorph thermal actuators combined with electrical sensor device and integrated micro channel. The goal of this device is to capture and characterize individual biocells or micro particles. After analysis of actuation by numerical modeling and simulation, practical fabrication of prototype probes is realized. Finally, we optimize the dimension of cantilevers and integrated parallel probe systems with microfluidic channels.

KW - Bimorph micro thermal actuator

KW - Single-cell detection

KW - SU-8

UR - https://www.scopus.com/pages/publications/30344476713

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Fabrication and optimization of bimorph micro probes for the measurement of individual biocells

Abstract

UN SDGs

Keywords

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