Fabrication of a stainless steel shadow mask using batch mode micro-EDM

Sang Min Yi; Min Soo Park; Young Soo Lee; Chong Nam Chu

doi:10.1007/s00542-007-0468-0

Fabrication of a stainless steel shadow mask using batch mode micro-EDM

Sang Min Yi, Min Soo Park, Young Soo Lee, Chong Nam Chu

Dept. of Mechanical System and Design Engineering

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

A metal shadow mask for organic thin-film transistors (OTFTs) has been fabricated by batch mode electro-discharge machining (EDM). Batch mode micro-electro-discharge machining method was applied for productivity improvement. Negative electrode with multiple holes (3 × 3 or 4 × 4) was fabricated using a single tool electrode. With the negative electrode, 3 × 3 and 4 × 4 tool electrode arrays are EDMed; 6 × 6 and 16 × 16 square hole array masks were batch mode EDMed with the fabricated multi-electrodes arrays. With 4 × 4 electrode array, the productivity is improved to five times of that in the case using a single electrode. Source and drain electrodes of OTFTs were successfully patterned on a pentacene active layer through the mask, and the fabricated pentacene TFTs had good output characteristics.

Original language	English
Pages (from-to)	411-417
Number of pages	7
Journal	Microsystem Technologies
Volume	14
Issue number	3
DOIs	https://doi.org/10.1007/s00542-007-0468-0
State	Published - Mar 2008

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@article{68bb8db7b841422bad03d51c004a8185,

title = "Fabrication of a stainless steel shadow mask using batch mode micro-EDM",

abstract = "A metal shadow mask for organic thin-film transistors (OTFTs) has been fabricated by batch mode electro-discharge machining (EDM). Batch mode micro-electro-discharge machining method was applied for productivity improvement. Negative electrode with multiple holes (3 × 3 or 4 × 4) was fabricated using a single tool electrode. With the negative electrode, 3 × 3 and 4 × 4 tool electrode arrays are EDMed; 6 × 6 and 16 × 16 square hole array masks were batch mode EDMed with the fabricated multi-electrodes arrays. With 4 × 4 electrode array, the productivity is improved to five times of that in the case using a single electrode. Source and drain electrodes of OTFTs were successfully patterned on a pentacene active layer through the mask, and the fabricated pentacene TFTs had good output characteristics.",

author = "Yi, \{Sang Min\} and Park, \{Min Soo\} and Lee, \{Young Soo\} and Chu, \{Chong Nam\}",

year = "2008",

month = mar,

doi = "10.1007/s00542-007-0468-0",

language = "English",

volume = "14",

pages = "411--417",

journal = "Microsystem Technologies",

issn = "0946-7076",

number = "3",

}

TY - JOUR

T1 - Fabrication of a stainless steel shadow mask using batch mode micro-EDM

AU - Yi, Sang Min

AU - Park, Min Soo

AU - Lee, Young Soo

AU - Chu, Chong Nam

PY - 2008/3

Y1 - 2008/3

N2 - A metal shadow mask for organic thin-film transistors (OTFTs) has been fabricated by batch mode electro-discharge machining (EDM). Batch mode micro-electro-discharge machining method was applied for productivity improvement. Negative electrode with multiple holes (3 × 3 or 4 × 4) was fabricated using a single tool electrode. With the negative electrode, 3 × 3 and 4 × 4 tool electrode arrays are EDMed; 6 × 6 and 16 × 16 square hole array masks were batch mode EDMed with the fabricated multi-electrodes arrays. With 4 × 4 electrode array, the productivity is improved to five times of that in the case using a single electrode. Source and drain electrodes of OTFTs were successfully patterned on a pentacene active layer through the mask, and the fabricated pentacene TFTs had good output characteristics.

AB - A metal shadow mask for organic thin-film transistors (OTFTs) has been fabricated by batch mode electro-discharge machining (EDM). Batch mode micro-electro-discharge machining method was applied for productivity improvement. Negative electrode with multiple holes (3 × 3 or 4 × 4) was fabricated using a single tool electrode. With the negative electrode, 3 × 3 and 4 × 4 tool electrode arrays are EDMed; 6 × 6 and 16 × 16 square hole array masks were batch mode EDMed with the fabricated multi-electrodes arrays. With 4 × 4 electrode array, the productivity is improved to five times of that in the case using a single electrode. Source and drain electrodes of OTFTs were successfully patterned on a pentacene active layer through the mask, and the fabricated pentacene TFTs had good output characteristics.

UR - http://www.scopus.com/inward/record.url?scp=38349110906&partnerID=8YFLogxK

U2 - 10.1007/s00542-007-0468-0

DO - 10.1007/s00542-007-0468-0

M3 - Article

AN - SCOPUS:38349110906

SN - 0946-7076

VL - 14

SP - 411

EP - 417

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 3

ER -

Fabrication of a stainless steel shadow mask using batch mode micro-EDM

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